IMAGING INTERFEROMETRIC LITHOGRAPHY - EXPERIMENT & THEORY
CD = 3 mm; i-line exposures, NA = 0.04, fshift = 0.09
Notes:
Similar results for a 3-micron CD pattern printed in a different part of the field at the same time as the 2-micron pattern on the previous figure. Note the outline of the large box in the middle exposure, this is analogous to the filtering effect of a simple RC low pass filter that shows transients at the leading and trailing edges of a pulse while blocking out the low frequency steady-state values.