| Floorplan
of CHTM'S Cleanroom (not
to scale)
Click
on a number for information for that equipment!
If
you wish to be trained on cleanroom equipment contact:
Beth Fuchs (505-272-7844)
| Item |
Equipment |
Tutorials
& Instructions |
Status |
Comments |
| |
Mask
aligner |
|
In
service |
|
| |
Microscope
inspection |
|
In
service |
|
| |
Hot
plates, ovens |
|
In
service |
|
| |
Photolithography
development |
|
In
service |
|
| 5 |
Photoresist
spinners |
|
In
service |
|
| 6 |
Acid
and base wet stations |
|
In
service |
|
| 7 |
Profilometer |
|
In
service |
|
| 8 |
Technics
Reactive ion etchers |
|
In
service |
|
| 9 |
Reactive Ion Beam Etcher (RIBE) |
|
In
service |
|
| 10 |
Rapid
thermal processor |
|
In
service |
|
| 11 |
RTA
and Plasma Etcher |
|
In
service |
|
| 12 |
Metal
Evaporator #1 |
|
In
service |
|
| 13 |
Ellipsometer |
|
In
service |
|
| 14 |
Oxidation
furnace |
|
In
service |
|
| 15 |
Samco
Plasma CVD |
|
In
service |
|
| 16 |
Dielectric
evaporator |
|
In
service |
|
| 17 |
PlasmaQuest ECR Etcher/ CVD |
|
In
service |
|
| 18 |
Inductively
coupled plasma (ICP) etcher |
|
In
service |
|
| 19 |
Gowning
room |
|
In
service |
|
|
