Getting Qualified on CHTM Equipment

Before operating CHTM equipment you must be qualified in its use. Below you will find documents to register your personal information, give you an overview Cleanroom orientation, and learn correct operating procedures for the various pieces of equipment you will be using. These are Microsoft Word downloads.

 

CHTM Cleanroom Information Form (Record of your personal information; necessary for Cleanroom access)

Clean Room Orientation Notes: Overview and General Safety

Basic ICP Operating Procedures

CHA Mark 40 Evaporator for Dielectric Films Operating Manual

Karl Suss Scriber Operating Instructions

Metal Evaporator Operating Procedures

Photolithography Bay Operating Procedure

Tegal Plasmaline Plasma Etch Operating Procedures

SAMCO PECVD System Operating Procedures