EECE 474/574: Microelectronics Processing
Course
Syllabus
Course title: MICROELECTRONICS PROCESSING
Course number: EECE 474/574
Course discipline: Electrical Engineering
Course description: This course will analyse unit processes used in Microelectronics Processing. We will also examine some examples of process integration that are used to fabricate devices. The course will focus on silicon technology but other (more advanced) technologies will also be discussed. The course will include laboratory sessions where students will gain hands on experience of microelectronics process technology
Course delivery: This course will be delivered using classroom lectures, lab sessions and an online component that will contain additional resources for the class including an ongoing bulletin board, where students can discuss material covered in the class. Please familiarise yourself with the UNM's WebCT system and be sure to sign up for a WebCT account when you register for this class.
Course Text: "The Science and Engineering of Microelectronic Fabrication", 2ND EDITION, by Stephen A. Campbell, Oxford University Press, ISBN:0-19-513605-5
Course date: Spring 2006, Classes begin on Tuesday Jan. 17th and are on Tuesday/Thursday, 11.00 AM to 12.15 PM, CHTM Room 103
There will be between 6 and 10 Lab sessions. These will each last a half day and will begin at some point during the 2nd, 3rd or 4th week of the semester at a time to be determined.
Locations:
This course is intended to provide the student with an understanding of the unit processes used in microelectronics processing. The course will also show how these processes are used in device technologies. The course will cover underlying theory as well as practical applications.
Instructor: Professor Stephen D. Hersee (More at www.chtm.unm.edu/hersee)
E-mail address: shersee@chtm.unm.edu
Office Location: CHTM, Room 112B (map can be found at: www.chtm.unm.edu, then select "Visit CHTM")
Office Hours: by appointment
Office Phone: 505 272 7823
Fax: 505 272 7801
Dr. Hersee is a tenured, Full Professor in the Electrical and Computer Engineering Department of UNM, and a Fellow of the IEEE. He has been a member of the ECE department since 1991 and has taught semiconductor processing, field-effect devices and junction devices. Dr. Hersee was named as the University of New Mexico's "Outstanding Teacher of the Year" for 2001/2002.
Dr. Hersee is also a full-time member of the Center for High Technology Materials where he conducts research in semiconductor materials and devices. Dr. Hersee's research includes programs to develop new semiconductor materials and new device technologies. Prior to joining UNM Dr. Hersee worked in major semiconductor corporations in the UK, France and the US. He has published and presented over 140 peer reviewed papers and he has graduated 4 MS and 9 Ph.D students while at UNM. (More at www.chtm.unm.edu/hersee)
This is how much the various components of this course score
Homeworks 40%
MIDTERM Exam 20%
LAB project Report 15%
FINAL Exam 25%
To assign Letter Grades at the end of the semester, I will use the following Grading System
(rounding to the nearest integer)
95 to 100 %= A+, 90 to <95 %= A , 85 to <90 % = A-
80 to <85%= B+, 75 to <80%= B, 70 to <75% = B-
65 to <70%= C+, 60 to <65%= C, 55 to <60% = C-
< 55% = F