Facilities - Cleanroom

 

 Floorplan of CHTM'S Cleanroom (not to scale)

 
 

 

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Click on a number for information for that equipment!

If you wish to be trained on cleanroom equipment contact:
(505-272-7844) 

Item
Equipment
Tutorials & Instructions
Status
Comments
1
Mask aligner
In service
2
Microscope inspection
In service
3

Hot plates, ovens
In service
4
Photolithography development
In service
5
Photoresist spinners
In service
6
Acid and base wet stations
In service
7
Profilometer
In service
8
Technics Reactive ion etchers
In service
9
Reactive Ion Beam Etcher (RIBE)
In service
10
Rapid thermal processor
In service
11
RTA and Plasma Etcher
In service
12
Metal Evaporator #1
In service
13
Ellipsometer
In service
14
Oxidation furnace
In service
15
Samco Plasma CVD
In service
16
Dielectric evaporator
In service
17
PlasmaQuest ECR Etcher/ CVD
In service
18
Inductively coupled plasma (ICP) etcher
In service
19
Gowning room
In service