Cleanroom

Cleanroom Diagram

If you wish to be trained on cleanroom equipment, please contact: Masahiro Kamei (505-410-7885)

 

Tool ID

Tool Manufacturer / Name

Comments

AB01 Local Mfg N/A Acid Bench  
AB02 Local Mfg N/A Acid Bench  
ALPS01 Tencor Alpha Step 500  
BB01 Local Mfg N/A Base Bench  
BB02 Various N/A Gold Electroplating  
BB03 Local Mfg N/A Developer Bench  
CVD01 SAMCO PD-10 PECVD TIP
ELP01 Gaertner L125B Ellipsometer  
EVAP01 Airco Temescal N/A Metal I Evaporator TIP
EVAP02 Telemark N/A Metal II Evaporator TIP
EVAP03 CHA Mark 40 Dielectric Evaporator TIP
EVAP04 Sharon Vacuum N/A Thernal Evaporator TIP
FRN01 Lindberg S5357-BDS Silicon Oxidation Furnace TIP
FRN02 Lindberg S5359-BDS Silicon Diffusion Furnace TIP
FRN05 Expert Semiconductor Expertech III-V Steam Oxidation Furnace  
HTP01 Dataplate 720 Series Hot Plate  
HTP02 Dataplate 720 Series Hot Plate  
HTP03 Dataplate 720 Series Hot Plate  
HTP04 Dataplate 720 Series Hot Plate  
LAM01 LAM Planar Etcher #01  
LAM02 LAM Planar Etcher #02  
MA01 Karl Suss MJ83 Mask Aligner  
MA03 Karl Suss MJ83 Mask Aligner  
MA04 Karl Suss MJ83 Mask Aligner  
MIC01 Leitz Ergolutz Microscope  
MIC03 Nikon UM-2 Microscope  
OVN01 Blue M OV-8A Oven  
OVN02 Blue M OV-8A Oven  
OVN03 Blue M OV-472A-3 Oven  
OVN04 Blue M OV-472A-4 Oven  
PE01 PlasmaTherm/Unaxis ICP TIP
PE02 Technics PEII-A Planar Etcher  
PE04 Plasmaline Asher Planar Etcher  
PE05 Plasma Technology Plasmaline TIP
RTA01 Modular Process RTA  
RTA02 Process Products 1150 RTA  
SB01 Solvent Bench  
SB02 Solvent Bench  
SB03 Solvent Bench  
SPIN01 Headway Research Spinner  
SPIN02 Headway Research Spinner  
STPR01 Stepper  

 

Manuf.

Photoresist

Tone

Exposure Wavelengths (in nm)

Reference

Aspect Ratio / Resolution

Primary Uses / Applications

SDS
AZ 5206-E Positive 1.0 - 2.0μm i-,h-line High resolution   PDF
AZ 5214-E Positive 1.0-2.0μm i-,h-line High resolution   PDF
AZ 5214-EIR Negative 1.0-2.0μm i-,h-line High resolution   PDF
AZ nLOF 2020 Negative 1.5-4.5μm i-line   Lift off PDF
AZ nLOF 2035 Negative 3.0-6.0μm i-line   Lift off PDF
AZ P4210 Positive 1.6-2.4μm h,g-line 2 to 1   PDF
AZ P4330-RS Positive 2.5-3.8μm h,g-line 2 to 1   PDF
AZ P4620 Positive 4.7-7.1μm h,g-line 2 to 1   PDF
DOW SPR 220-3.0 Positive 2.0-4.5μm i-line, broadband   General Purpose PDF
DOW SPR 510A Positive .75-1.15μm i-line     PDF
DOW Ultra-I 123-0.8 Positive .09-.5μm i-line   General Purpose PDF


Training Videos for Equipment

MA06 Mask Aligner